TY  - BOOK
AU  - Elliott, David J 
TI  - Microlithography: : Process technology for IC fabrication
SN  - 0-07-019304-5
PY  - 1986///
CY  - New York: 
PB  - McGraw-Hill book Company, 
KW  - Microlithography
KW  - Resist coating and softbake
ER  -