TY  - BOOK
AU  - Agajanian, A H
TI  - Ion implantation in microelectronics: : A comprehensive bibliography
SN  - 0-306-65198-X
PY  - 1981///
CY  - New York: 
PB  - IFI/Plenum, 
KW  - Bibliography
KW  - Microelectronics
ER  -