00423nam a22000977a 4500008004100000040005500041080002100096100001400117245013900131260005500270230612b        |||||||| |||| 00| 0 eng d  aNational Science LibrarycNational Science Library  a621.3.049.77bN91 aVyas, H P  aIntensive course on microelectronics technology practice & trends: bVlsi manufacturingc/ Microtech 99 23 August to 1 September, 1999  aPilani:  bSemi conductor Society of India, c1999